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How is the permeability of quartz glass products?


The structure of quartz glass is relaxed, and at high temperature, it also allows the ions of certain gases to diffuse through the network, among which the diffusion of sodium ions will be fast.

This performance of quartz glass is important for users. For example, when quartz glass is used as a high-temperature container or diffusion tube in the semiconductor industry, because the semiconductor material requires high purity, the refractory material used as a furnace lining in contact with quartz glass must undergo high temperature and cleaning treatment in advance to remove alkaline impurities such as potassium and sodium before it can be put into quartz glass for use.

At room temperature, it can be considered that quartz glass is impermeable, and at high temperatures (for example, 700 ° C), the permeability constant of some gases is also very small. Therefore, it can be used in high temperature and high vacuum equipment.