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How to clean quartz tube?

Release time:

2024-06-05 11:13

Quartz glass is often used in semiconductor industrial equipment at a high temperature of 1000 ℃ to 1300 ℃. In this state, devitrification occurs due to the attachment of impure substances. The devitrification part is the crystallization of quartz, and the transition point of crystallization is 275 ℃. When quartz glass drops from high temperature to this transition temperature, the crystalline part of surface devitrification and the quartz glass itself have different expansion coefficients between the high-temperature α phase and the low-temperature β phase. When the opaque peeling is more serious under rapid cooling, it will cause cracking.

In order to make quartz products can be used for longer, we must pay attention to prevent the cause of quartz devitrification, and the source of pollution caused by devitrification is alkali metal, alkaline earth metal, sweat, saliva, oil, dust... and so on.

0.1 mg/cm²It will cause tens or hundreds of times the amount of devitrification. Therefore, to prevent these pollution sources from attaching to the quartz surface, in addition to not directly taking the quartz with empty hands, cleaning must be done before high-temperature operation to ensure the cleanliness of the quartz surface. Generally, the cleaning of quartz requires some procedures. First, rinse the surface with pure water, then soak it in a pickling tank for some time, then rinse it with pure water and dry it.

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